• Resolution: 280nm or better
• N.A.: 0.55
• Exposure Light Source: KrF Excimer Laser (248nm)
• Reduction Ratio: 1:5
• Exposure Field: 22mm square to 17.9 (H) x 25.2(V)mm
• Alignment Accuracy (EGA, lxl+ 3 sigma: 55nm or better
• Alignment System: LSA (Standard), FIA (Standard), LIA (Optional)
• Located in the U.K.

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