VERTEC SC 1600-2
with DUAL STACK and RESISTIVITY CONTROLLERS

VER_02.JPG (11720 bytes) 

  • Wafer upto 6"
  • Mask upto 5" x 5"
  • Cycle time: 0~999 sec.
  • RPM: 0~3200
  • Power: 120 V, 50/60Hz, 15 A