VARIAN
3180
SPUTTERING SYSTEM

VARIAN 3180 6 SPUTTER SYSTEM

  • Fluke 1720A controller
  • HP3438A digital multimeter
  • Wide range thin film monitor
  • CTI Cryo-Toor 8 with SC compressor
  • Varian 845 vacuum ionization gauge
  • MKS type 250B controller
  • MKS type 227A baratron
  • 2/3 targets
  • Varian power supplies