- Primarily Maintained by Eaton Parts/Labor Contract
- Datalock-II Fluke Controller w/SECS II Protocol
- Four Cylinder Gas Box
- Bernas Source w/Enlarged Vaporizer
- Source Housing Liner
- Electron Shower IV
- Pressure Compensation Upgrade
- D90A End Station Vacuum Pump
- D16A End Station and Beamline Vacuum Pumps
- 150mm AT-4 Autoloader
- Vacuum Exchange Arms
- Clampless Disks
- Process Chamber Liner
- Fast Scan Option
|
- Low Particulate Vent Valve Assy
- Autoclean Software
- Varian Diffusion Pump
- CTI Cryo Pumps (2) with Air Cooled Compressors
- Surge Protection
- HP Scope
- Remote Operator Console
- Vacuum Controller Software (VAC 487 REV F)
- Dose Controller Software (Dose 498 REV F)
- AMU Controller Software (AMU 410 REV B)
- AT4 Controller Software (AT4 708 REV A)
- Electronic EMO Controller
- CRT Beam Controller
|