TECHLINK
The Leading Semiconductor Equipment Remanufacturing and Remarketing Service Company
DIFFUSION / CVD
Thermco
Thermco 5100 6" Diffusion Furnaces
Thermco 4900, 4500, 4300, 4100 with TMX 12K and 9002 Controllers
Thermco Analog Controller 4100 Furnaces
Thermco Furnace Engineering Support and Custom Jungle Manufacturing
Thermco Furnace Spare Parts
More Manufacturers
ASM SF-50 PECVD 8" Wafer
Bruce BDF4 Furnaces
Bruce BTU 7351C Controllers and Furnaces
Bruce BTU 6" Vertical Furnaces Model L2-12
Bruce BTU 6" Vertical Furnaces Model L2-650
MRL Phoenix 3-Tube LPCVD Furnces - 8" capable
Novellus Concept 1
SEMY Controllers for Thermco or Tempress Furnaces
Tokyo Electron 6" Vertical Furnaces Model VDF-615, VCF-615 - Process Types: POCL3, TEOS, Doped Poly, Poly, Nitride, Pyrogenic Ox
Watkins Johnson 999R Furnaces
DRY ETCHERS
Applied Etchers
Applied Materials Precision 5000 Mark II Reactive Ion Etchers
Applied Materials 8330, 8320, 8310 Etchers
Applied Materials 8130, 8120, 8110 Etchers
Tegal
Tegal 1513e, 1511e Etchers
Tegal 915, 903e, 901 Etchers
Tegal 803, 801 Etchers
Tegal 701 Etchers
Tegal 515 Etchers
Tegal 421, 415, 411 Etchers
Tegal Etcher Spare Parts
Tegal RF Cables
More Manufacturers
Branson IPC Etchers
Drytek Mega Strip 6 Etchers
Drytek 100 Poly / Nitride Etchers
Electrotech Plasmafab ND6200 Plasma Deposition Systems
Lam 4600 Etchers
Lam 4500 Etchers
Lam 4400 Etchers
Lam 790 Etchers
Lam 690 Etchers
Lam 590 Etchers
Lam 490 Etchers
Plasmatherm 360
Sumitomo / Lam ECR CVD / Metal Etchers
ION IMPLANTERS
Applied Materials
Applied Materials 9200 Ion Implanters
Applied Materials Precision 9000 High Current Ion Implanters
Eaton-Nova
Eaton-Nova NVGSD-100, NVGSD-200 High Current Ion Implanters
Eaton-Nova 10-160 High Current Ion Implanters
Eaton-Nova 10-80 High / Mid Current Ion Implanters
Eaton-Nova 6200 Mid Current Ion Implanters
Eaton-Nova 3206 Mid Current Ion Implanters
Eaton-Nova Ion Implanter Spare Parts
Varian
Varian E500 Implanters
Varian 160XP High Current Ion Implanters
Varian 120 High Current Ion Implanters
Varian 80-10 Ion Implanters
Varian 350-D Ion Implanters
Varian 350-DE Ion Implanters
Varian 300-XP Ion Implanters
Varian CF-5 Ion Implanters
Varian CF-4 Ion Implanters
Varian CF3000 Ion Implanters
Varian Ion Implanter Spare Parts
MICROLITHOGRAPHY
ASML
ASML 5500/100D Steppers
ASML 2500/10 Steppers
Canon
Canon FPA-2500i3 Steppers
Canon FPA-2000i1 Steppers
Canon FPA-1550 Mark IV Steppers
Canon MPA-600FAB Mirror Projection Mask Aligners
Canon MPA-500FA Mirror Projection Mask Aligners
Canon MPA Test Kits
Canon PLA-600F Proximity Mask Aligners
Canon PLA-600FA Proximity Mask Aligners
Canon PLA 521FA Proximity Mask Aligners
Canon PLA501F / 501FA Proximity Mask Aligners
Canon 4" / 5" Conversion Kits for Canon PLA501FA
GCA
GCA 6300A Steppers
GCA 6300 Steppers
GCA 6200 Steppers
GCA 6100A Steppers
Nikon
Nikon 1755i7A Steppers - 5" / 6"
Nikon 1755G7A Steppers - 5" / 6"
Nikon 1505G7D Steppers - 6"
Nikon 1505GIIA Steppers - 5"
Nikon NSR-1505EX-1 Excimer Steppers
Nikon 1505G6E 5X Steppers
Nikon 1505G4D 5X Steppers
Nikon Lampas M-3 / M-2 Incident Light Micro-Pattern Analyzer
Nikon 2I Laser Interfermoneteric X-Y Measuring Machine
Nikon Stepper Spare Parts
Perkin-Elmer / SVGL
SVGL (Perkin-Elmer) Micralign 700 Series Aligners
Perkin-Elmer 661HT, 651HT, 641HT Mask Aligners
Perkin-Elmer 552HT, 551HT, 550HT, 540HT Mask Aligners
Perkin-Elmer 340HT, 340, 320HT, 320, 310 Mask Aligners
Perkin-Elmer M240HT, 220HT Mask Aligners
Perkin-Elmer Mask Aligner Special Application Systems
Perkin-Elmer Mask Aligner Projection Optics / Lens
Perkin-Elmer Mask Aligner HPC Units
Perkin-Elmer Mask Aligner Tooling
Spot Cool Model 30HU Air Conditioning Unit for the Perkin-Elmer Mask Aligner (can be used for one or two Perkin-Elmer systems)
Perkin-Elmer Mask Aligner Spare Parts
Ultratech
Ultratech Stepper Model 2700
Ultratech Stepper Model 2244I
Ultratech Stepper Model 1700
Ultratech Stepper Model 1500, 0.8m
Ultratech Stepper Model 1500, 1.0m
Ultratech Stepper Model 1100, 0.8m
Ultratech Stepper Model 1100, 1.0m
Ultratech Stepper Model 1000WF, 1.0m with upgrades - 4" / 5" / 6"
Ultratech Stepper Model 1000WF, 1.25m with upgrades - 4" / 5" / 6"
Ultratech Stepper Model 1000S, 1.0m with upgrades - 4" / 5" / 6"
Ultratech Stepper Model 990 - 4" / 5" / 6"
Ultratech Stepper Smart Autoloaders - 4" / 5" / 6"
Ultratech Stepper Tooling
Ultratech Stepper Spare Parts
MISCELLANEOUS EQUIPMENT
ADE Thickness Measurement Tools
Aeronica WIS150 Particle Counters
AG Associates Heatpulse 2101
AMC 7800 Epi Reactors
AMS 3300 Epi Reactors
AMS 2100 Reactors
ASM America Lawton Encapsulation Press
ASQ Wafer Transfer Systems
Atrium Tri-Temp 5050 Automatic SOIC Handlers
Bake Ovens
Biorad QS3200 Spectrometers
Biorad SR800 Scanning Electron Microscopes
CHA Gold Evaporators
Convection Ovens: M, Fisher, Precision
DaiNippon Screen SCW-629-BV Coaters
Dektak Surface Profilers
Disco DFG-83H/6 Surface Grinder
EG&G CV Plotters
Electroglas 3001X Wafer Probing Systems
Electroglas 2001X Wafer Probing Systems
Electroglas 1034XA-6, 1034XA, 1034X Probers
Electrotech 5200 Oxide Deposition
ENI OEM 6
Fairchild Sentry 21, 20 Testers
Fairchild Sentry 10, 8, 7 Testers
Fusion 150 PC Photostabilization Systems
Gaertner Scientific Model L115 Ellipsometers
Gasonics Hipox
GCA 8500, 8000 5X Steppers
GCA 6700, 6300A, 6300, 6200, 6100A 5X Steppers
GCA Tracks
GCA Track Spare Parts
Gemini 3 Epi Reactors
Headway Research Photoresist Spinners
Henry RF Generators
HermCo Model HercuLift-150LB Nova disk Ergo Hoist
Hewlett-Packard V1000 Versa Test Systems
Hitachi Microwave Plasma Etching Systems Model M-308ATE
Hnu Systems ISPI-101 Photo-Ionizer
Hnu Systems PI-101 Photo-Ionizer
Huntron TrackerScopes
Innovative Engineering Burnboxes
Jeol JBX-6A II E-Beam Lithography Systems
Karl Suss MJB3 Mask Aligners
Karl Suss MA56 Mask Aligners
Kasper 4500 Tracks
KLA 228, 221, 208 Wafer Inspection Systems
KLA 70 Computers
KLA 20 Computers
Kulicke and Soffa 1470-1 Series B Wire Bonders
Laminar Flow Hoods with C Frames - many sizes and manufacturers
Lawton 190 Ton Press
Mactronics UKA-450, UKB-450 Wafer Transfer Tools
Mactronics UKA-425 Wafer Loaders
MDC Measurement Systems
Megatest Q8K Testers
Metricon PC-200 Prism Couplers
Micron Corp Selfert Reticle Guide Mounters
MTI Omnichucks
MTI 6300C Scrubbers
MTI Targetracks
Nanoline 50 CD
Nanometrics Nanospec 212, 211, 210
Nanometrics Nanospec 181, 180
Nikon Loaders Model NWL 641, NWL 640
Nikon Microscopes
Nikon Optistations
Olympus Microscopes
OSI Linewidth Measurement Systems
OSI Microvision 500 Measurement System Laserline Auto Focus
OSI VLS-1 CD Measurement Systems
Polyflow Tube Cleaners
Rudolph AutoEL IV Ellipsometers
Scanning Electron Microscopes + X-Ray
Semitool ST-870D Double Stack Spin / Rinser / Dryers - 4" / 5" / 6"
Semitool ST-860D Double Stack Spin / Rinser / Dryers - 4" / 5" / 6"
Semitool WST172 Hazardous Liquid Process Systems
SSI 1-A Coaters, 3-Track
SSI 1-A Developers, 3-Track
SVG 8800 Coaters and Developers, 3-Track
SVG 8600 Multi Hot Plate Bake Robot Arm Transfer Systems
SVG 8600 Scrubbers
SVG 8600 Spinners
SVG 8136 Triple Bake Tracks
SVG 8100 Tracks
SVG Micrascan II DUV Exposure Systems
Symtek 300 Handlers
Tables: Stainless Steel / Formica - several sizes available
Tencor 300 MGAGE
Tencor 200 MGAGE
Ultratech Mask and Wafer Cleaners
Veeco Evaporators
Veeco Four Point Probes
Verteq Mark V High Capacity Rinser / Dryers
Verteq Megasonic Cleaners
Wafer Transfer Systems - ASQ - 6"; Mactronix Eureka UKA 525, UKA 500, UKA 450, SS 400; Quartz International; Rapitran I, Jr; MGI Challenger II / I
Watkins Johnson 999R TEOS Systems
Watkins Johnson 999 Atmospheric Pressure Vapor Deposition Systems
Wet Benches - several models available
Yield Engineering Systems Vapor Prime Ovens Model LPIII, 6112A
SPUTTERS
Varian 3290 Sputtering Systems
Varian 3190, 3180 Sputtering Systems
Varian Sputter Conversion Kits
Contact TECHLINK for further information and details